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Properties of diamondlike films obtained in a barrier discharge at...

AbstractDiamondlike films are synthesized from gaseous hydrocarbons in a barrier discharge at atmospheric pressure. The films were investigated using transmission electron microscopy, electron...

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Method for pulsed magnetron deposition of diamondlike films on large-area...

AbstractThe circuit of the pulse power supply of a magnetron sputtering system and the circuit of a high voltage generator used to realize the process of pulsed magnetron deposition of diamondlike...

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Residual-Photoresist Removal from Si and GaAs Surfaces by Atomic-Hydrogen...

AbstractIt is shown by experiment that a directed atomic-hydrogen stream offers a means of residual-photoresist removal from Si and GaAs surfaces. The dependence of postprocess surface roughness on...

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Mechanical properties of thin Ag films on a silicon substrate studied using...

AbstractThe mechanical properties of thin Ag films of equal thickness containing grains of various sizes were studied. The film hardness was measured using the Oliver-Pharr techniques based on...

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Pulsed electron-beam melting of a copper — steel 316 system: Evolution of the...

AbstractThe surface topography, chemical composition, microstructure, nanohardness, and tribological characteristics of a Cu (film, 512 nm)-stainless steel 316 (substrate) system subjected to pulsed...

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Influence of silicon processing in atomic hydrogen on the formation of local...

AbstractThe effect of intense atomic hydrogen flux on the defect density in the surface layer of single-crystal silicon is studied. It is shown that the formation of local molten regions by...

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Nanocomposite and nanostructured superhard Ti-Si-B-N coatings

AbstractElectron microscopy, x-ray diffraction analysis, and micro-and nanohardness measurements were used to investigate the interrelations between the fine structure and the variations in strength...

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Specific features of the determination of the mechanical characteristics of...

AbstractThe hardness and the elastic modulus of Cu thin films on Si, Ti, Cu, and Al substrates are investigated. It is demonstrated that the use of the Oliver-Pharr method in combination with the...

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Surface doping of VT6 alloy with zirconium by pulsed electron-beam mixing of...

AbstractWe have studied characteristics of the surface doping of VT6 alloy (Ti-6Al-4V) with zirconium, which was effected in order to reduce the concentrations of Al and V at the surface. The doping...

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Investigation of plasma characteristics in an unbalanced magnetron sputtering...

AbstractResults are presented from experimental studies of a magnetron sputtering system for different configurations of the magnetic field above the cathode surface. The current-voltage...

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Solid nanocrystalline fullerite-containing carbon coatings

AbstractSolid carbon coatings with a high content of nanocrystalline fullerite have been obtained using unbalanced magnetron sputtering of graphite under conditions of pulsed high-voltage ion...

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Effect of residual internal stresses in tin coatings on specific losses in...

AbstractMethods of X-ray diffraction analysis, mass-spectrometry, and atomic force microscopy have been used to perform a comparative analysis of factors that cause the appearance of residual stresses...

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Gallium-doped zinc oxide films deposited using an unbalanced magnetron...

AbstractGallium-doped zinc oxide films are deposited using an unbalanced magnetron sputtering system. The films are deposited by dc sputtering of a conducting ceramic target in an argon atmosphere. The...

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Properties of multilayer ZnO:Ga/Ag/ZnO:Ga coatings applied by magnetron...

AbstractThe methods of van der Pau, spectrometry, and atomic force microscopy were used to study the optical and electrophysical properties of multilayer ZnO:Ga/Ag/ZnO:Ga coatings applied by magnetron...

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Study of the plasma parameters in a high-current pulsed magnetron sputtering...

AbstractResults are presented from experimental studies of the current-voltage characteristics and spatial and temporal parameters of the plasma in a high-current pulsed magnetron sputtering system...

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Synthesis of Ti 3 Al and TiAl based surface alloys by pulsed electron-beam...

AbstractPhase formation and surface hardening in the 100-nm-thick Al(film)/Ti(substrate) system under conditions of pulsed electron-beam melting (∼15 keV, ∼3 μs, 3–4 J/cm2) have been studied depending...

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Optical studies of plasma inhomogeneities in a high-current pulsed magnetron...

AbstractResults are presented for experimental studies of the plasma glow in a high-current pulsed magnetron discharge by using a high-speed optical frame camera. It is found that the discharge plasma...

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Effect of conditions of pulsed electron-beam melting for Al (film)/Ti...

AbstractFindings of comparative investigations are presented for phase formation, characteristics of hardening, tribological properties, and oxidation resistance of Ti-Al intermetallic surface alloys...

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Properties of low-emission coatings based on Ag and Cu deposited on polymer...

AbstractResults of experiments on the deposition of multilayer low-emission coatings with “oxide-metaloxide” structure on polyethylene terephthalate film by magnetron sputtering are presented. The...

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Hard carbon coatings deposited by pulsed high current magnetron sputtering

AbstractHard (up to 17 GPa) carbon coatings are deposited onto face SiC bearings used in liquid pumps by pulsed high-current magnetron sputtering of graphite. As a result, the friction coefficient is...

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